Highly Sensitive Sensor Structure Based on Sol-Gel Waveguide Films and Grating Couplers

The technologies of optical planar evanescent wave chemical and biochemical sensors require chemically resistant, high refractive index waveguide films having very good transmission properties. In this paper we present such two-compound SiOx:TiOy fabricated by using the sol-gel method dip-coating technique. These not only have quality low propagation losses but also an extremely >1.90 (? = 632.8 nm). Further demonstrate efficient simple sensing structures, designed based on these films. For purpose, grating couplers with a period ? 417 nm were interface between film cover single-step nanoimprint method. structures tested as refractometers. results theoretical analysis basis which well their experimental characterization are presented in work. Consequently, relationship parameters sensitivity investigated is discussed. As result, profitable properties coupler verified excellent consistency achieved.